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Materials and processes in semiconductor devices and MEMS
- Measurement and extraction of electrical properties (conductivity, permittivity, permeability) for new materials over a wide frequency band.
- Deposition (LPCVD, PECVD, electrochemical) and etching (chemical, plasma) techniques for thin film coatings on solid substrates (silicon, glass…).
- Optical non-destruct, characterization, laser and low-coherence interferometry for high precision shapes and residual stress measurement, vibrometry and thermoreflectivity.
- Expertise in micromechanical testing, and internal stress measurements.

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Universite catholique de Louvain
Place de l'Université, 1
1348 Louvain-le-Neuve ()
Homepage: http://www.uclouvain.be

Technology Transfer Officer - Micro/Nano Technologies - ICT Lederer Dimitri
Phone: +3210472443
Fax: +3210472489