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|Micro- and nano-electro-mechanical-systems|
- Measurement and extraction of electrical properties (conductivity, permittivity, permeability) over wide frequency band and temperature range.
- Deposition (LPCVD, PECVD, electrochemical) and etching (chemical, plasma) techniques for thin film coatings on solid substrates (silicon, glass…)
- Optical non-destructive characterization. Laser and low-coherence interferometry for high precision shapes and residual stress measurement, vibrometry and thermoreflectivity.
- Expertise in micromechanical testing, and internal stress measurements.