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LA-WATAP
Laser Assisted 3D Atom Probe for Materials & Semiconductors

The CAMECA LA-WATAP is a high performance Tomographic (or 3D) Atom Probe, providing quantitative atomic scale 3D elemental mapping of chemical heterogeneities in materials.
The LA-WATAP offers the following key advantages:

- Analysis of semiconductor materials with near-atomic depth resolution thanks to flexible (IR / visible / UV) ultrafast (400fs) laser setup.
- Excellent mass resolution even on low thermal conductivity materials.
- Large area of analysis (up to 100 nm in diameter) for a better statistics on composition measurements.
- Fast acquisition rate: ~15 min. needed for collecting 1E6 atoms.
- Best quantitative results with the exclusive Advanced Delay Line Detector (ADLD) and its benchmark multi-hit performance.
- Flexible and fast dedicated FIM (Field Ion Microscopy) detector for metallurgical applications.

Thanks to its unique femto-second LASER evaporation mode, the CAMECA LA-WATAP performs 3D chemical analysis with atomic spatial resolution on semiconductors and insulating samples, applications formerly excluded from conventional Atom Probe.

Company
CAMECA
29 quai des Gresillons
92622 Gennevilliers Cedex ()
Homepage: http://www.cameca.com