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EVG®6200 Semi-automated NIL System
For pattern creation in UV-curable materials from a prestructured stamp to a substrate.

The EVG6200 Infinity is the culmination of the new aligner-technology roadmap of EV Group. A variety of stamps and substrates sizes from 75mm-to-200mm can be accommodated on the EVG6200 Infinity for nanoimprint lithography applications.


* Nanoimprint lithography and micro contact printing
* UV light exposure
* Dedicated tooling for UV-NIL
* Accommodation of both soft and hard stamps
* Type of substrates: Si, glass, compound semiconductors

EV Group
DI Erich Thallner Strasse 1
A-4782 St. Florian am Inn ()
Homepage: http://www.EVGroup.com

Clemens Schütte
Phone: +43 7712 5311 0
Fax: +43 7712 5311 4600