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LIBRA® 200FE
FE-EFTEM with In-column Corrected OMEGA Filter
The LIBRA® 200FE is the first EFTEM that combines the versatility of the new In-column corrected OMEGA energy filter with a highly efficient field emission system and Koehler illumination.
The prealigned OMEGA filter provides fully integrated filtered imaging and spectroscopy capabilities for comprehensive analysis in semiconductor, material analysis and life science research. Consequently, the LIBRA® 200FE ensures that you obtain optimum results from your sample with genuine ease of operation in EFTEM, EELS, HRTEM, STEM and diffraction work.
The new 2nd order corrected spectrometer allows unrivalled isochromatic sample viewing areas and diffraction angle acceptance at sub-eV energy resolution. Excellent instrument performance results from the advanced 300 mm column concept and the newly developed control electronics for sub-ppm stability.
The LIBRA® 200FE is operated through dedicated control panels and the WinTEM™ GUI following the successful philosophy of the SEM instruments for maximum convenience and consistent look-and-feel operation across the complete EM product range.

Key Features
200 kV Schottky field emitter with Koehler illumination system
Ultra high resolution over the full high voltage range
In-column corrected OMEGA filter
HR- and HT-objective lenses
High precision 5-axes goniometer stage
Rotation-free projector system
300 mm high stability column
Dry differential vacuum system
Sub-ppm stability control electronics
WinTEM™ graphical user interface

Company
Carl Zeiss NTS GmbH
Carl-Zeiss-Str. 56
73447 Oberkochen (Germany)
Homepage: http://www.smt.zeiss.com/nts

Contact
Carl Zeiss SMT - NTS Division Empfang
Phone: 07364 20 4488
Fax: 07364 20 4343
info-nts@smt.zeiss.com