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The ULTRA series, based on the SUPRA™ FESEM series comprises a high efficiency, high resolution In-column EsB detector which enables ultra high resolution BSE imaging.
The ULTRA FESEM integrates the latest developments in the GEMINI® technology utilising a newly developed Energy and angle selective Backscattered detector (EsB). The ULTRA features the GEMINI® In-lens SE detector for clear topographic imaging and the EsB detector for compositional contrast imaging enabling simultaneous real time imaging and mixing of both signals.

The EsB detector incorporates a filtering grid which enables high resolution BSE imaging revealing previously unseen image details.

Carl Zeiss NTS GmbH
Carl-Zeiss-Str. 56
73447 Oberkochen (Germany)
Homepage: http://www.smt.zeiss.com/nts

Carl Zeiss SMT - NTS Division Empfang
Phone: 07364 20 4488
Fax: 07364 20 4343