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The ULTRA series, based on the SUPRA™ FESEM series comprises a high efficiency, high resolution In-column EsB detector which enables ultra high resolution BSE imaging.
The ULTRA FESEM integrates the latest developments in the GEMINI® technology utilising a newly developed Energy and angle selective Backscattered detector (EsB). The ULTRA features the GEMINI® In-lens SE detector for clear topographic imaging and the EsB detector for compositional contrast imaging enabling simultaneous real time imaging and mixing of both signals.
The EsB detector incorporates a filtering grid which enables high resolution BSE imaging revealing previously unseen image details.