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microRSP-A300
The microRSP-A300 makes use of the Micro 4-Point Probe characterised by having a probe pitch of 1000 times smaller pin spacing/pitch than that of conventional probes. This unique feature allows the microRSP to uncover significant thin film characteristics that can be determining factors in relation to the properties and functionality of a thin film- and end products. With the launch of the microRSP-A300, CAPRES A/S has taken the well known and proven 4-point probing technology far into the future of semiconductor production. It offers accurate and reliable surface resistivity measurements of 300 mm (200 mm optional) wafers for advanced chip makers – CAPRES Microscopic Four-Point Probes offers all the benefits of conventional four point probes, but does not penetrate the USJ layer. It is a versatile system, CAPRES Microscopic Four Point Probes can be used to measure the sheet resistance on most conducting thin films used in the semiconductor industry

Company
CAPRES AS
SCION-DTU, Diplomvej 373
2800 KGS LYNGBY (DENMARK)
Homepage: http://www.capres.com/

Contact
VP Sales and Marketing Olivier DULAC
Phone: +45 45 25 67 00
Fax: +45 45 25 67 10
od@capres.com