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NanoMaker is a perfect solution for 3D nano lithography
NanoMaker is a state-of art lithographic system compatible to most of modern SEM, FIB and e-lithographs intended for
-design and litho-data preparation including 2D/3D proximity effect correction
-e-beam (FIB) lithography including alignment and stitching
-2D/3D patterning simulation (exposure and development of positive and negative resists)

Further details at www.nanomaker.com

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Interface Ltd.
Bardin str. 4/1,
119334 Moscow (Russia)
Homepage: http://eng.interface.ru/home.asp