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VPG 1600 - THE ULTIMATE HIGH VOLUME PHOTOMASK PRODUCTION TOOL
The new Volume Pattern Generator (VPG) line of large area lithography systems is a milestone in technological innovation and product development from Heidelberg Instruments, based on a patented vast exposure process parallelization. VPG is a reliable and economical solution, ideal for high volume production of todays demanding photomasks in electronic packaging, color filters and other applications requiring high resolution features on large areas with excellent image quality and registration.

The VPG can be configured with various stage dimensions and can be configured with an automated write mode exchanging unit (Automatic Write Mode), providing always the best throughput and resolution for various applications.

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Company
Heidelberg Instruments Mikrotechnik GmbH
Tullastr. 2
69126 Heidelberg (Germany)
Homepage: http://www.himt.de