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DWL 2000 - THE FAST AND FLEXIBLE LASER LITHOGRAPHY TOOL
The DWL 2000 laser lithography system is a fast and flexible, high resolution pattern generator for mask making and direct writing. In addition to 2D patterns, the state of the art technology of the system can also create complex 3D structures in thick photoresist with a single pass. With a write area of up to 200 x 200 mm² the system is the perfect solution for fast patterning of masks and wafers in MEMS, BioMEMS, Micro Optics, ASICs, Micro Fluidics, Sensors, CGHs, and all other applications that require microstructures.

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Company
Heidelberg Instruments Mikrotechnik GmbH
Tullastr. 2
69126 Heidelberg (Germany)
Homepage: http://www.himt.de