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DWL 66FS - THE ULTIMATE R&D LASER LITHOGRAPHY TOOL
The DWL 66FS laser lithography system is an economical, high resolution pattern generator for low volume mask making and direct writing.The capabilities and flexibility of this system make it the ultimate lithographic research tool in MEMS, BioMEMS, Micro Optics, ASICs, Micro Fluidics, Sensors, CGHs, and all other applications that require microstructures.

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Company
Heidelberg Instruments Mikrotechnik GmbH
Tullastr. 2
69126 Heidelberg (Germany)
Homepage: http://www.himt.de