Nano-imprint product, either in its development or manufacturing phase, can be inspected with high degree of accuracy with our visual/surface inspection system gSuper 5000Kh. By computerizing the function of the human eye, this system is able to detect defects such as scratch or pattern defect in size of 90 nanometer (1/115850 of FOV in case of point defect, 1/1310000 of FOV in case of line defect) with only 1 camera. Our inspection technology has been internationally patented in 12 countries and provided automatization of inspection procedure to the leading manufactures (ex. advanced film, glass and etc.) in 31 industries in Japan.