|"Ratis" – plane-parallel device for positioning/scanning (stage)|
Ratis – a family of plane-parallel devices for positioning/scanning, developed by engineers NST.
Ratis multi-axes scanners are equipped with capacitive displacement sensors for digital feedback loop. It provides high accuracy and linearity of movement and eliminates tthe creep effect of piezoceramics. Capacitance measurements are made with TDC (time-to-digital conversion) chips located as close as possible to sensors. Such a design leads to the low noise and high speed displacement control. Ratis is applicable for use in the field of scanning probe microscopy, positioning, metrology, biology research, microelectronics, micromanipulation and etc.